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Togotech: 새 문서: 에지 센서 <ol> <li> 전자부품 <ol> <li>기구 <ol> <li> 프루버 <ol> <li> 에지 센서 - 이 페이지 </ol> </ol> <li>참조 <ol> <li> 마이크로 스위...
2024-07-10T00:32:55Z
<p>새 문서: 에지 센서 <ol> <li> <a href="/index.php/%EC%A0%84%EC%9E%90%EB%B6%80%ED%92%88" title="전자부품" data-bs-title="전자부품">전자부품</a> <ol> <li>기구 <ol> <li> <a href="/index.php/%ED%94%84%EB%A3%A8%EB%B2%84" title="프루버" data-bs-title="프루버">프루버</a> <ol> <li> <a href="/index.php/%EC%97%90%EC%A7%80_%EC%84%BC%EC%84%9C" title="에지 센서" data-bs-title="에지_센서">에지 센서</a> - 이 페이지 </ol> </ol> <li>참조 <ol> <li> <a href="/index.php/%EB%A7%88%EC%9D%B4%ED%81%AC%EB%A1%9C" class="mw-redirect" title="마이크로" data-bs-title="마이크로">마이크로</a> 스위...</p>
<p><b>새 문서</b></p><div>에지 센서<br />
<ol><br />
<li> [[전자부품]]<br />
<ol><br />
<li>기구<br />
<ol><br />
<li> [[프루버]]<br />
<ol><br />
<li> [[에지 센서]] - 이 페이지<br />
</ol><br />
</ol><br />
<li>참조<br />
<ol><br />
<li> [[마이크로]] 스위치<br />
</ol><br />
</ol><br />
<li>프루버에서, 웨이퍼 에지를 검출하기 위한 센서를 말한다.<br />
<li>기술<br />
<ol><br />
<li>Keithley 회사 Probe Card Tutorial 에서<br />
<gallery><br />
image:edge_sensor01_001.jpg<br />
</gallery><br />
</ol><br />
<li> [[프루브카드]]에 설치함.<br />
<ol><br />
<li>캔틸레버 - DC 측정용<br />
<ol><br />
<li>높이 검출용 센서, wafer edge sensor, 프루브 터치다운(touchdown)을 검출해서 Z-높이를 결정할 때 사용한다.<br />
<gallery><br />
image:tph_sst01_004.jpg<br />
image:tph_sst01_007.jpg<br />
image:tph_sst01_008.jpg<br />
image:tph_sst01_009.jpg<br />
</gallery><br />
</ol><br />
</ol><br />
</ol></div>
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